Thick-film PZT-metallic triple beam resonator
نویسندگان
چکیده
منابع مشابه
Micro-particle manipulation by single beam acoustic tweezers based on hydrothermal PZT thick film.
Single-beam acoustic tweezers (SBAT), used in laboratory-on-a-chip (LOC) device has promising implications for an individual micro-particle contactless manipulation. In this study, a freestanding hydrothermal PZT thick film with excellent piezoelectric property (d33 = 270pC/N and kt = 0.51) was employed for SBAT applications and a press-focusing technology was introduced. The obtained SBAT, act...
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ژورنال
عنوان ژورنال: Electronics Letters
سال: 2003
ISSN: 0013-5194
DOI: 10.1049/el:20030611